ECE 546 Gaseous Electronics
Basic science of gas discharges and plasmas. Electrode
phenomenon and plasma oscillations. Application of gas discharges to dry
etching, plasma-assisted chemical vapor deposition, and sputtering.
Credit Hours: 3 Lecture
Prerequisites: Consent of instructor
Textbooks:
"Glow Discharge Processes", Brian Chapman John Wiley & Sons, New York, 1980.
References:
"Fundamentals of Gaseous Ionization and Plasma Electronics", Essam Nasser, Wiley, 1971.
Goals:
To familiarize the students with electron collision phenomenon. -
To familiarize the students with basic plasma properties.
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To introduce plasma assisted etching, deposition, and cleaning.
Projects:
Simulation of an electron motion in a gas. Monte Carlo simulation of electron energy distribution
function in Argon. Calculation of electron-molecule collision rates.
Computer Tools: Matlab
Last Review: Spring Semester 2004
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