Department of Electrical and Computer Engineering

ECE 548 Advanced Electronic Devices

A study of techniques in fabricating microelectronic and discrete electronic devices and influences on device design. Thick film hybrid, thin film hybrid, monolithic bipolar, and monolithic MOS technology will be examined.

Credit Hours: 3 Lecture

Prerequisites: ECE 345 and ECE 447

Textbooks:

1. "Silicon VLSI Technology, Fundamentals, Practice and Modeling", Plummer, Deal and Griffin, Prentice Hall, 2000.

References:

1. VLSI Technology, 2nd edition, S. M. Sze, McGraw Hill, New York, 1983.

Goals:

1. To familiarize the students with modern CMOS technology.

2. To familiarize basic fabrication processes such as lithography, oxidation, diffusion, ion implantation, deposition, etching and packaging.

Projects:

1. Simulation of a float zone refining.

2. Simulation of thermal oxidation of silicon.

Computer Tools: Matlab, Excel

Last Review: Spring Semester 2004