ECE 459 MEM's & Micro-Engineering
Introduction to micro-electromechanical systems (MEMS),
manufacturing techniques, microsensors, microactuators, microelectronics and
microcontrollers.
Credit Hours: 4 (3 Lecture, 1 Project)
Prerequisites: ECE
315 and ECE 356
Textbooks:
"Microsystem Technology and Microrobotics", S. Fatikow & U. Rembold, Springer-Verlag, 1997.
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